高周波スパッタリングで作製した酸化亜鉛圧電薄膜の結晶構造解析と圧電素子への応用
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Table of Contents
目次
第1章 序論
p1
1-1 研究の背景
p1
1-2 ZnO薄膜研究の歴史
p2
1-3 ZnO薄膜応用素子研究の現状
p4
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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- コウシュウハ スパッタリング デ サクセイ シタ サンカ アエン アツデン ハクマク ノ ケッショウ コウゾウ カイセキ ト アツデン ソシ エノ オウヨウ
- Author/Editor
- 吉野幸夫 [著]
- Author Heading
- 吉野, 幸夫 ヨシノ, ユキオ
- Publication, Distribution, etc.
- Publication Date
- 2001
- Publication Date (W3CDTF)
- 2001
- Extent
- 1冊
- Degree grantor/type
- 金沢大学