博士論文

高周波スパッタリングで作製した酸化亜鉛圧電薄膜の結晶構造解析と圧電素子への応用

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高周波スパッタリングで作製した酸化亜鉛圧電薄膜の結晶構造解析と圧電素子への応用

Call No. (NDL)
UT51-2001-K647
Bibliographic ID of National Diet Library
000000405518
Persistent ID (NDL)
info:ndljp/pid/3186294
Material type
博士論文
Author
吉野幸夫 [著]
Publisher
[吉野幸夫]
Publication date
2001
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
金沢大学,博士 (工学)
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Notes on use

Note (General):

博士論文

Table of Contents

  • 目次

  • 第1章 序論

    p1

  • 1-1 研究の背景

    p1

  • 1-2 ZnO薄膜研究の歴史

    p2

  • 1-3 ZnO薄膜応用素子研究の現状

    p4

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Paper Digital

Material Type
博士論文
Title Transcription
コウシュウハ スパッタリング デ サクセイ シタ サンカ アエン アツデン ハクマク ノ ケッショウ コウゾウ カイセキ ト アツデン ソシ エノ オウヨウ
Author/Editor
吉野幸夫 [著]
Author Heading
吉野, 幸夫 ヨシノ, ユキオ
Publication, Distribution, etc.
Publication Date
2001
Publication Date (W3CDTF)
2001
Extent
1冊
Degree grantor/type
金沢大学