博士論文

Study on Piezoelectric Thin Film for Micromachines

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Study on Piezoelectric Thin Film for Micromachines

Call No. (NDL)
UT51-2001-N688
Bibliographic ID of National Diet Library
000000409446
Persistent ID (NDL)
info:ndljp/pid/3188864
Material type
博士論文
Author
李成浩 [著]
Publisher
[李成浩]
Publication date
2001
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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博士論文

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Table of Contents

  • The table of contents

  • 1.Introduction

    p1

  • 1.1 Microsystems applications of piezoelectric materials

    p6

  • 1.2 Motivation of the research

    p13

  • References

    p15

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Study on Piezoelectric Thin Film for Micromachines
Author/Editor
李成浩 [著]
Author Heading
李, 成浩 リ, ソンホ
Publication, Distribution, etc.
[李成浩]
Publication Date
2001
Publication Date (W3CDTF)
2001
Extent
1冊
Alternative Title
マイクロマシンのための圧電薄膜に関する研究 マイクロマシン ノ タメ ノ アツデン ハクマク ニ カンスル ケンキュウ
Degree grantor/type
東北大学