極薄酸化膜における静電気破壊対策技術の研究
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Table of Contents
Provided by：国立国会図書館デジタルコレクションLink to Help Page
目次
p1
第1章 序論
p1
1.1 研究の背景
p1
1.2 静電気破壊対策の課題
p7
1.3 本研究の目的
p10
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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- ゴクハク サンカマク ニ オケル セイデンキ ハカイ タイサク ギジュツ ノ ケンキュウ
- Author/Editor
- 川添豪哉 [著]
- Author Heading
- 川添, 豪哉 カワゾエ, ヒデチカ
- Publication, Distribution, etc.
- Publication Date
- [2001]
- Publication Date (W3CDTF)
- 2001
- Extent
- 1冊
- Degree Grantor
- 東北大学