低誘電率有機シリカ膜の堆積と物性評価に関する研究
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Table of Contents
Provided by：国立国会図書館デジタルコレクションLink to Help Page
論文目録
目次
第1章.序論
p1
1-1.背景
p1
1-2.低誘電率層間絶縁膜の分類
p6
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- Material Type
- 博士論文
- Title Transcription
- テイユウデンリツ ユウキ シリカマク ノ タイセキ ト ブッセイ ヒョウカ ニ カンスル ケンキュウ
- Author/Editor
- 宇佐美浩一 [著]
- Author Heading
- 宇佐美, 浩一 ウサミ, コウイチ
- Publication, Distribution, etc.
- Publication Date
- [2001]
- Publication Date (W3CDTF)
- 2001
- Extent
- 1冊
- Degree Grantor
- 東京工業大学