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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- Proceedings of the fifth Symposium on Ion Sources and Ion-Assisted Technology ; Proceedings of International Workshop by Professional Group on Ion-Based Techniques for Film Formation
- Author/Editor
- Edited by Toshinori Takagi
- Author Heading
- 高木, 俊宜, 1925- タカギ, トシノリ, 1925- ( 00534720 )Authorities
- Publication, Distribution, etc.
- Publication Date
- [1981]
- Publication Date (W3CDTF)
- 1981
- Extent
- 489p
- Size
- 30cm