半導体製造技術集成

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半導体製造技術集成

Call No. (NDL): ND371-141
Bibliographic ID of National Diet Library: 000001613087
Persistent ID (NDL): info:ndljp/pid/12599109

Material type: 図書

Author: 鈴木将成 [ほか]編集

Publisher: 新技術開発センター

Publication date: 1982.10

Material Format: Paper・Digital

Capacity, size, etc.: 522p ; 31cm

NDC: 549.8

Notes on use

Note (General)：: ルーズリーフ

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Paper Digital

Material Type: 図書
Title: 半導体製造技術集成
Title Transcription: ハンドウタイセイゾウギジュツシュウセイ
Author/Editor: 鈴木将成 [ほか]編集
Author Heading: 鈴木, 将成, 1939- スズキ, マサシゲ, 1939- ( 00075645 )Authorities
Publication, Distribution, etc.: 東京 : 新技術開発センター
Publication Date: 1982.10
Publication Date (W3CDTF): 1982
Extent: 522p
Size: 31cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 半導体ハンドウタイ ( 00562913 )Authorities
NDC 8th ed.: 549.8
NDLC: ND371
Target Audience: 一般
Note (General): ルーズリーフ
Price: 78000円
Holding library: 国立国会図書館
Call No.: ND371-141
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000001613087
http://id.ndl.go.jp/bib/000001613087
National Bibliography No. (JPNO): 83030199
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111