超微細加工とレジスト材料 (RD ; 74)

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超微細加工とレジスト材料(RD ; 74)

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Material Type: 図書
Title: 超微細加工とレジスト材料
Title Transcription: チョウビサイカコウトレジストザイリョウ
Series Title: RD ; 74
Publication, Distribution, etc.: 東京 : シーエムシー
Publication Date: 1985.12
Publication Date (W3CDTF): 1985
Extent: 255p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 集積回路シュウセキカイロ ( 00572448 )Authorities
電子光学デンシコウガク ( 00561450 )Authorities
NDC 8th ed.: 549.7
NDLC: ND386
Target Audience: 一般
Note (General): 発売: ジスク
Note (Bibliography): 各章末: 文献
Price: 45000円
Holding library: 国立国会図書館
Call No.: ND386-396
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000001782042
http://id.ndl.go.jp/bib/000001782042
National Bibliography No. (JPNO): 86020880
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111