最新機能成膜プロセス技術 : エレクトロニクスにおける機能膜作製技術

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Material Type: 図書
Title: 最新機能成膜プロセス技術 : エレクトロニクスにおける機能膜作製技術
Title Transcription: サイシンキノウセイマクプロセスギジュツ
Author/Editor: 逢坂哲弥, 二瓶公志編
Author Heading: 逢坂, 哲弥, 1945- オウサカ, テツヤ, 1945- ( 00186785 )Authorities
二瓶, 公志, 1937- ニヘイ, コウジ, 1937- ( 00054388 )Authorities
Publication, Distribution, etc.: 東京 : 広信社
Publication Date: 1987.6
Publication Date (W3CDTF): 1987
Extent: 862p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 膜 (工学) マク (コウガク) ( 00567419 )Authorities
NDC 8th ed.: 571.4
NDLC: PA161
Target Audience: 一般
Note (Bibliography): 各章末: 文献
Price: 31000円 (税込)
Holding library: 国立国会図書館
Call No.: PA161-E14
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000001975720
http://id.ndl.go.jp/bib/000001975720
National Bibliography No. (JPNO): 89032352
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111