微細加工 : サブミクロン素子への展開
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国立国会図書館デジタルコレクション
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Table of Contents
1 まえがき
2 微細加工の歴史
3 微細加工
4 半導体の微細加工
5 微細加工の発達
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Northern Japan
山形県立図書館
Paper- Call No.：
- 549.7-ﾅｶ
- Book Registration Number：
- 102173184
Kanto
千葉県立西部図書館
Paper- Call No.：
- 5497/ 54/
- Book Registration Number：
- 1100705897
東京都立中央図書館
Paper- Call No.：
- 5491-3023-89
- Book Registration Number：
- 1123395964
神奈川県立川崎図書館
Paper- Call No.：
- 549.1-N9
- Book Registration Number：
- 80089758
横浜市立図書館
Paper- Call No.：
- 549.7200
- Book Registration Number：
- 0003950220
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Bibliographic Record
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- Material Type
- 図書
- Title
- Title Transcription
- ビサイ カコウ
- Author/Editor
- 中野朝安 [ほか]共著
- Author Heading
- 中野, 朝安, 1923- ナカノ, トモヤス, 1923- ( 00052635 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1989.3
- Publication Date (W3CDTF)
- 1989
- Extent
- 240p
- Size
- 21cm