サブミクロンULSIプロセス技術 1 (Ultra clean technology)

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国立国会図書館デジタルコレクション

サブミクロンULSIプロセス技術. 1(Ultra clean technology)

Call No. (NDL): ND386-E106
Bibliographic ID of National Diet Library: 000002057888
Persistent ID (NDL): info:ndljp/pid/13649520

Material type: 図書

Author: 半導体基盤技術研究会編

Publisher: リアライズ社

Publication date: 1989.11

Material Format: Paper・Digital

Capacity, size, etc.: 250p ; 27cm

NDC: 549.7

Notes on use

Note (General)：: 監修: 大見忠弘, 新田雄久

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Paper Digital

Material Type: 図書
Title: サブミクロンULSIプロセス技術
Title Transcription: サブミクロンユーエルエスアイプロセスギジュツ
Volume: 1
Author/Editor: 半導体基盤技術研究会編
Series Title: Ultra clean technology
Author Heading: 半導体基盤技術研究会ハンドウタイキバンギジュツケンキュウカイ ( 00264648 )Authorities
Publication, Distribution, etc.: 東京 : リアライズ社
Publication Date: 1989.11
Publication Date (W3CDTF): 1989
Extent: 250p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 集積回路シュウセキカイロ ( 00572448 )Authorities
NDC 8th ed.: 549.7
NDLC: ND386
Target Audience: 一般
Note (General): 監修: 大見忠弘, 新田雄久
Note (Bibliography): 各章末: 参考文献
Price: 20600円 (税込)
Holding library: 国立国会図書館
Call No.: ND386-E106
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002057888
http://id.ndl.go.jp/bib/000002057888
National Bibliography No. (JPNO): 90051835
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111