ULSIにおけるプロセス・デバイス技術とその限界
Available in National Diet Library
Find on the publisher's website
国立国会図書館デジタルコレクション
Search by Bookstore
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
Search by Bookstore
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title Transcription
- ユーエルエスアイ ニ オケル プロセス デバイス ギジュツ ト ソノ ゲンカイ
- Author Heading
- 応用物理学会 オウヨウ ブツリ ガッカイ ( 00281497 )Authorities
- Publication, Distribution, etc.
- Publication Date
- [1990]
- Publication Date (W3CDTF)
- 1990
- Extent
- 98p
- Size
- 26cm
- Place of Publication (Country Code)
- JP