半導体製造装置通信スタンダード(SECS)

Author: Semiconductor Equipment and Materials Institute, Incorporated. [著]ほか

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Material Type: 図書
Title: 半導体製造装置通信スタンダード(SECS)
Title Transcription: ハンドウタイセイゾウソウチツウシンスタンダードエスイーシーエス
Author/Editor: Semiconductor Equipment and Materials Institute, Incorporated. [著]
SEMIジャパン [訳]
Author Heading: Semiconductor Equipment and Materials Institute, Incorporated ( 00536777 )Authorities
SEMIジャパン SEMI ジャパン ( 00299615 )Authorities
Publication, Distribution, etc.: 東京 : SEMIジャパン
Publication Date: [1986]
Publication Date (W3CDTF): 1986
Extent: 41, 111p
Size: 30cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Original Text Lang. Code: eng
Subject Heading: 半導体製造装置ハンドウタイセイゾウソウチ ( 001237257 )Authorities
データ伝送データデンソウ ( 00561491 )Authorities
NDC 8th ed.: 549.8
NDLC: ND371
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: ND371-E108
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002173789
http://id.ndl.go.jp/bib/000002173789
National Bibliography No. (JPNO): 92036574
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111