図書

超精密洗浄技術 : 実態と課題 (テクニカルリサーチレポート ; no.7)

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超精密洗浄技術 : 実態と課題(テクニカルリサーチレポート ; no.7)

Call No. (NDL)
PA551-E24
Bibliographic ID of National Diet Library
000002180815
Persistent ID (NDL)
info:ndljp/pid/13656217
Material type
図書
Author
シーエムシー
Publisher
シーエムシー
Publication date
1992.3
Material Format
Paper・Digital
Capacity, size, etc.
269p ; 31cm
NDC
576.5
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Notes on use

Note (General):

監修: 角田光雄発売: ジスク

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Table of Contents

  • 目次

  • 刊行のねらい

  • 第1章 精密洗浄の技術動向

  • 1 精密洗浄技術/ 1

    角田光雄

  • 1.1 精密洗浄と超精密洗浄/ 1

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Northern Japan

  • 宮城県図書館

    Paper
    Call No.:
    576.5/1992.3/タ
    Book Registration Number:
    1006492001

Kinki

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  • CiNii Research

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Paper Digital

Material Type
図書
Title Transcription
チョウ セイミツ センジョウ ギジュツ
Author Heading
Publication, Distribution, etc.
Publication Date
1992.3
Publication Date (W3CDTF)
1992
Extent
269p
Size
31cm