超高純度ガスの科学. 第1分冊(コンセプト編)(Surface science technology series ; 2)

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Material Type: 図書
ISBN: 4-947655-64-X
Title: 超高純度ガスの科学
Title Transcription: チョウコウジュンドガスノカガク
Volume: 第1分冊(コンセプト編)
Author/Editor: UCS半導体基盤技術研究会編
Series Title: Surface science technology series ; 2
Author Heading: 半導体基盤技術研究会ハンドウタイキバンギジュツケンキュウカイ ( 00264648 )Authorities
Publication, Distribution, etc.: 東京 : リアライズ社
Publication Date: 1993.12
Publication Date (W3CDTF): 1993
Extent: 367, 13p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 半導体ハンドウタイ ( 00562913 )Authorities
気体キタイ ( 00566025 )Authorities
NDC 8th ed.: 549.8
NDLC: ND371
Target Audience: 一般
Note (Bibliography): 各章末: references
Price: 52530円 (税込)
Holding library: 国立国会図書館
Call No.: ND371-E181
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002293253
http://id.ndl.go.jp/bib/000002293253
National Bibliography No. (JPNO): 94014930
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111