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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Author/Editor
- organized by ISSP '91 Committeesupported by the Study Committee of Sputtering & Plasma Processes, Japan Technology Transfer Associationwith the cooperation of the Japan Society of Applied Physics ... [et al.]
- Publication, Distribution, etc.
- Publication Date
- 1991
- Publication Date (W3CDTF)
- 1991
- Extent
- ii, 161 p. : ill.
- Size
- 30 cm
- Place of Publication (Country Code)
- JP
- Text Language Code
- eng