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図書

Proceedings : the first International Symposium on Sputtering & Plasma Processes, ISSP '91

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Proceedings : the first International Symposium on Sputtering & Plasma Processes, ISSP '91

Call No. (NDL)
M15-A8834
Bibliographic ID of National Diet Library
000002306847
Material type
図書
Author
organized by ISSP '91 Committeeほか
Publisher
the Committee
Publication date
1991
Material Format
Paper
Capacity, size, etc.
ii, 161 p. : ill. ; 30 cm
NDC
-
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Notes on use

Note (General):

1 paper (15 p.) in pocket.Includes bibliographical references

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Paper

Material Type
図書
Author/Editor
organized by ISSP '91 Committee
supported by the Study Committee of Sputtering & Plasma Processes, Japan Technology Transfer Association
with the cooperation of the Japan Society of Applied Physics ... [et al.]
Publication, Distribution, etc.
Publication Date
1991
Publication Date (W3CDTF)
1991
Extent
ii, 161 p. : ill.
Size
30 cm
Place of Publication (Country Code)
JP
Text Language Code
eng