図書

半導体産業における超純水の製造・装置・応用技術

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半導体産業における超純水の製造・装置・応用技術

Call No. (NDL)
ND371-E197
Bibliographic ID of National Diet Library
000002336198
Material type
図書
Author
IPC技術情報室 編
Publisher
アイピーシー
Publication date
1985.7
Material Format
Paper
Capacity, size, etc.
288p ; 27cm
NDC
549.8
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Notes on use

Note (General):

奥付の書名: 超純水の製造・装置・応用技術

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Paper

Material Type
図書
Title Transcription
ハンドウタイ サンギョウ ニ オケル チョウジュンスイ ノ セイゾウ ソウチ オウヨウ ギジュツ
Author/Editor
IPC技術情報室 編
Author Heading
Publication, Distribution, etc.
Publication Date
1985.7
Publication Date (W3CDTF)
1985
Extent
288p
Size
27cm