図書

Status and prospects of compact synchrotrons : May we expect their turn for lithography?

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Status and prospects of compact synchrotrons : May we expect their turn for lithography?

Call No. (NDL)
M15-A9176
Bibliographic ID of National Diet Library
000002384428
Material type
図書
Author
日本放射光学会
Publisher
Japanese Society for Synchrotron Radiation Research
Publication date
[1991?]
Material Format
Paper
Capacity, size, etc.
iv, 73 p. : ill. ; 26 cm
NDC
-
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Cover title.Includes bibliographical references

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Paper

Material Type
図書
Author Heading
日本放射光学会 ニホン ホウシャコウ ガッカイ ( 00293706 )Authorities
Publication Date
[1991?]
Publication Date (W3CDTF)
1991
Extent
iv, 73 p. : ill.
Size
26 cm
Place of Publication (Country Code)
JP
Text Language Code
eng