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図書

新しい半導体製造プロセスと材料

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新しい半導体製造プロセスと材料

Call No. (NDL)
ND371-G146
Bibliographic ID of National Diet Library
000002896677
Material type
図書
Author
大見忠弘 監修
Publisher
シーエムシー
Publication date
2000.5
Material Format
Paper
Capacity, size, etc.
274p ; 27cm
NDC
549.8
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Table of Contents

Provided by:国立国会図書館Link to Help Page
  • 目次

  • 第1章 序論

    大見忠弘

  •  半導体固有の製造技術創出:半導体技術はまさにこれから

  • 1 はじめに/ 1

  • 2 ウルトラクリーンテクノロジー提唱と確立/ 1

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Paper

Material Type
図書
ISBN
4-88231-276-X
Title Transcription
アタラシイ ハンドウタイ セイゾウ プロセス ト ザイリョウ
Author/Editor
大見忠弘 監修
Author Heading
大見, 忠弘, 1939- オオミ, タダヒロ, 1939- ( 00406390 )Authorities
Publication, Distribution, etc.
Publication Date
2000.5
Publication Date (W3CDTF)
2000
Extent
274p