Search by Bookstore
Table of Contents
序論 シリコンの科学
1. まえがき/ 3
2. 0.25μm以降のリソグラフィ技術/ 3
3. エピタキシャルウェーハ導入の必然性/ 5
4. エピタキシャル結晶の高品質化/ 8
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
Kinki
滋賀県立図書館
Paper- 3-5498-ユ
- 126804038
other
CiNii Research
Search ServicePaper
Search by Bookstore
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- ISBN
- 4-947655-88-7
- Title
- Title Transcription
- シリコン ノ カガク
- Author/Editor
- UCS半導体基盤技術研究会 編大見忠弘, 新田雄久 監修
- Series Title
- Author Heading
- 大見, 忠弘, 1939- オオミ, タダヒロ, 1939- ( 00406390 )Authorities新田, 雄久 ニッタ, タカヒサ ( 00806755 )Authorities半導体基盤技術研究会 ハンドウタイ キバン ギジュツ ケンキュウカイ ( 00264648 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1996.6
- Publication Date (W3CDTF)
- 1996