図書

シリコンの科学 (Surface science technology series ; no.3)

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シリコンの科学

(Surface science technology series ; no.3)

Call No. (NDL)
ND371-G192
Bibliographic ID of National Diet Library
000003050482
Material type
図書
Author
UCS半導体基盤技術研究会 編ほか
Publisher
リアライズ社
Publication date
1996.6
Material Format
Paper
Capacity, size, etc.
1030, 16p ; 27cm
NDC
549.8
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Table of Contents

  • 序論 シリコンの科学

    大見忠弘

  • 1. まえがき/ 3

  • 2. 0.25μm以降のリソグラフィ技術/ 3

  • 3. エピタキシャルウェーハ導入の必然性/ 5

  • 4. エピタキシャル結晶の高品質化/ 8

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Paper

Material Type
図書
ISBN
4-947655-88-7
Title Transcription
シリコン ノ カガク
Author/Editor
UCS半導体基盤技術研究会 編
大見忠弘, 新田雄久 監修
Author Heading
大見, 忠弘, 1939- オオミ, タダヒロ, 1939- ( 00406390 )Authorities
新田, 雄久 ニッタ, タカヒサ ( 00806755 )Authorities
半導体基盤技術研究会 ハンドウタイ キバン ギジュツ ケンキュウカイ ( 00264648 )Authorities
Publication, Distribution, etc.
Publication Date
1996.6
Publication Date (W3CDTF)
1996