Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.

• Material Type: 図書
• ISBN: 0841207755
• ISSN (series): 0097-6156
• Title: Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
• Series Title: ACS symposium series
• Author Heading: Thompson, L. F., 1944-; Willson, C. G. (C. Grant) , 1939-; Bowden, M. J., 1943-; American Chemical Society. Division of Organic Coatings and Plastics Chemistry.; American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
• Publication, Distribution, etc.: Washington, D.C. : The Society
• Publication Date: 1983.
• Publication Date (W3CDTF): 1983
• Extent: ix, 363 p. : ill. ; 24 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Microlithography -- Congresses.; Photoresists -- Congresses.; Plasma etching -- Congresses.
• LCC: TR940
• DDC: 686.2/315
• NDLC: M15; ND
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: M15-A52
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003104953; http://id.ndl.go.jp/bib/000003104953
• LC Control Number: 83005968 //r853; https://lccn.loc.gov/83005968
• Bibliographic Record Category (NDL): 211

• Contents: An introduction to lithography / L.F. ThompsonThe lithographic process--the physics / L.F. Thompson and M.J. BowdenOrganic resist materials--theory an...