図書

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg. (Materials Research Society symposia proceedings ; v. 17)

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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

(Materials Research Society symposia proceedings ; v. 17)

Call No. (NDL)
M15-A2929
Bibliographic ID of National Diet Library
000003112864
Material type
図書
Author
Osgood, R. M.ほか
Publisher
North-Holland
Publication date
c1983.
Material Format
Paper
Capacity, size, etc.
xiii, 298 p. : ill. ; 24 cm.
NDC
-
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"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.

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Paper

Material Type
図書
ISBN
0444007822
ISSN (series)
0272-9172
Title
Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
Series Title
Materials Research Society symposia proceedings ; v. 17
Author Heading
Osgood, R. M.
Brueck, S. R. J.
Schlossberg, H. R.
United States. Air Force. Office of Scientific Research.
Publication, Distribution, etc.
New York : North-Holland
Publication Date
c1983.
Publication Date (W3CDTF)
1983
Extent
xiii, 298 p. : ill. ; 24 cm.