図書

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)

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Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984.

(ACS symposium series)

Call No. (NDL)
M15-A2628
Bibliographic ID of National Diet Library
000003121013
Material type
図書
Author
Thompson, L. F., 1944-ほか
Publisher
The Society
Publication date
1984.
Material Format
Paper
Capacity, size, etc.
viii, 494 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0841208719
ISSN (series)
0097-6156
Title
Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984.
Series Title
ACS symposium series
Author Heading
Thompson, L. F., 1944-
Willson, C. G. (C. Grant) , 1939-
Fréchet, J. M. J.
American Chemical Society. Division of Polymeric Materials: Science and Engineering.
American Chemical Society. Division of Polymer Chemistry.
American Chemical Society. Meeting (187th : 1984 : Saint Louis, Mo.)
Publication, Distribution, etc.
Washington, D.C. : The Society
Publication Date
1984.
Publication Date (W3CDTF)
1984
Extent
viii, 494 p. : ill. ; 24 cm.