図書

Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California / Fred H. Pollak, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 524)

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Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California / Fred H. Pollak, chairman/editor.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 524)

Call No. (NDL)
M15-A1320
Bibliographic ID of National Diet Library
000003126293
Material type
図書
Author
Pollak, Fred H.ほか
Publisher
SPIE--the International Society for Optical Engineering
Publication date
c1985.
Material Format
Paper
Capacity, size, etc.
vi, 169 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0892525592 (pbk.)
Title
Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California / Fred H. Pollak, chairman/editor.
Series Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 524
Author Heading
Pollak, Fred H.
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
Publication Date
c1985.
Publication Date (W3CDTF)
1985
Extent
vi, 169 p. : ill. ; 28 cm.
Place of Publication (Country Code)
US