図書

300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar, Tuesday, February 25. 1997 ... Tokyo, Japan / planned by 300mm Physical Interfaces and Carriers SEAJ/SEMI-J Joint Committee ; [editors, Terry Asakawa, Naoko Tani, Mihoko Ichinose]. 2nd ed.

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300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar, Tuesday, February 25. 1997 ... Tokyo, Japan / planned by 300mm Physical Interfaces and Carriers SEAJ/SEMI-J Joint Committee ; [editors, Terry Asakawa, Naoko Tani, Mihoko Ichinose].

2nd ed.

Call No. (NDL)
M18-A198
Bibliographic ID of National Diet Library
000003255548
Material type
図書
Author
300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar (1997 : Tokyo)ほか
Publisher
SEMI-Japan
Publication date
1997.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 30 cm.
NDC
-
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"予稿集"--Colophon.English and/or Japanese.Cover title.

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Paper

Material Type
図書
Title
300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar, Tuesday, February 25. 1997 ... Tokyo, Japan / planned by 300mm Physical Interfaces and Carriers SEAJ/SEMI-J Joint Committee ; [editors, Terry Asakawa, Naoko Tani, Mihoko Ichinose].
Edition
2nd ed.
Author Heading
300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar (1997 : Tokyo)
浅川, 輝雄 アサカワ, テルオ ( 00818513 )Authorities
Tani, Naoko. [谷奈穂子 ]
Itinose, Mihoko. [一瀬美保子]
日本半導体製造装置協会 ニホン ハンドウタイ セイゾウ ソウチ キョウカイ ( 00293650 )Authorities
Semiconductor Equipment and Materials International.
Publication, Distribution, etc.
Tokyo : SEMI-Japan
Publication Date
1997.
Publication Date (W3CDTF)
1997
Extent
1 v. (various pagings) : ill. ; 30 cm.
Place of Publication (Country Code)
JP
Text Language Code
eng
jpn