図書

Plasma etching processes for sub-quarter micron devices -- : Plasma etching processes for sub-quarter micron devices : International symposium : Oct 1999, Honolulu, HI. (PV ; 99-30)

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Plasma etching processes for sub-quarter micron devices -- : Plasma etching processes for sub-quarter micron devices : International symposium : Oct 1999, Honolulu, HI.

(PV ; 99-30)

Call No. (NDL)
M17-01-3334
Bibliographic ID of National Diet Library
000003452057
Material type
図書
Author
Electrochemical Society.ほか
Publisher
Electrochemical Society
Publication date
2000.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.Held as part of the joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan.Index term: plasma etch...

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Paper

Material Type
図書
ISBN
1566772532
Title
Plasma etching processes for sub-quarter micron devices -- : Plasma etching processes for sub-quarter micron devices : International symposium : Oct 1999, Honolulu, HI.
Series Title
PV ; 99-30
Author Heading
Electrochemical Society.
Electrochemical Society of Japan.
Publication, Distribution, etc.
Electrochemical Society
Publication Date
2000.
Publication Date (W3CDTF)
2000
Extent
v.
Alternative Title
Held as part of the joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan
plasma etching processes ; sub quarter micron devices ; micron devices ; electrochemical