図書

Chemical mechanical planarization in IC device manufacturing III -- : Chemical mechanical planarization in IC device manufacturing : International symposium : 3rd : Oct 1999, Honolulu, HI. (PV ; 99-37)

Icons representing 図書

Chemical mechanical planarization in IC device manufacturing III -- : Chemical mechanical planarization in IC device manufacturing : International symposium : 3rd : Oct 1999, Honolulu, HI.

(PV ; 99-37)

Call No. (NDL)
M17-01-3338
Bibliographic ID of National Diet Library
000003452061
Material type
図書
Author
Electrochemical Society.ほか
Publisher
-
Publication date
2000.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
View All

Notes on use

Note (General)：

Papers.Held as part of the 196th Meeting of the Electrochemical Society and 1999 Fall meeting of the Electrochemical Society of Japan.Index term: chem...

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
ISBN
1566772605
Title
Chemical mechanical planarization in IC device manufacturing III -- : Chemical mechanical planarization in IC device manufacturing : International symposium : 3rd : Oct 1999, Honolulu, HI.
Series Title
PV ; 99-37
Author Heading
Electrochemical Society.
Electrochemical Society of Japan.
Publication Date
2000.
Publication Date (W3CDTF)
2000
Extent
v.
Alternative Title
Held as part of the 196th Meeting of the Electrochemical Society and 1999 Fall meeting of the Electrochemical Society of Japan
chemical mechanical planarization ; IC device manufacturing ; electrochemical
NDLC
M17