ICMPC '88 : International conference on materials and process characterization for VLSI : Oct 1988, Shanghai, China.

Notes on use

Note (General)：: Papers.Index term: process characterization ; ICMPC ; VLSI ; materials.BL shelfmark: 5394.1015 1988.

Search by Bookstore

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 9971506882
Title: ICMPC '88 : International conference on materials and process characterization for VLSI : Oct 1988, Shanghai, China.
Author Heading: Chinese Institute of Electronics.
Fudan University.
Publication, Distribution, etc.: World Scientific
Publication Date: 1988.
Publication Date (W3CDTF): 1988
Extent: v.
Alternative Title: process characterization ; ICMPC ; VLSI ; materials
NDLC: M17
ND
Note (General): Papers.
Index term: process characterization ; ICMPC ; VLSI ; materials.
BL shelfmark: 5394.1015 1988.
Holding library: 国立国会図書館
Call No.: M17-88-2347
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003473073
http://id.ndl.go.jp/bib/000003473073
UKMARC No.: G01164041
Bibliographic Record Category (NDL): 215