Semiconductor fabrication : technology and metrology : 5th International symposium on semiconductor processing : Feb 1988, Santa Clara, CA. (ASTM Special Technical Publication ; 990)

Semiconductor fabrication : technology and metrology : 5th International symposium on semiconductor processing : Feb 1988, Santa Clara, CA.

(ASTM Special Technical Publication ; 990)

Call No. (NDL): M17-89-2550
Bibliographic ID of National Diet Library: 000003476609

Material type: 図書

Author: American Society for Testing and Materials. Committee F-1 on Electronics.ほか

Publisher: ASTM

Publication date: c1989.

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers.Index term: semiconductor processing ; semiconductor fabrication ; ASTM.BL shelfmark: 1747.090 vol 990 1989.

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Paper

Material Type: 図書
ISBN: 0803112734
Title: Semiconductor fabrication : technology and metrology : 5th International symposium on semiconductor processing : Feb 1988, Santa Clara, CA.
Series Title: ASTM Special Technical Publication ; 990
Author Heading: American Society for Testing and Materials. Committee F-1 on Electronics.
Semiconductor Equipment and Materials Institute.
National Institute for Standards and Technology.
Publication, Distribution, etc.: Philadelphia, PA : ASTM
Publication Date: c1989.
Publication Date (W3CDTF): 1989
Extent: v.
Alternative Title: semiconductor processing ; semiconductor fabrication ; ASTM
NDLC: M17
ND
Note (General): Papers.
Index term: semiconductor processing ; semiconductor fabrication ; ASTM.
BL shelfmark: 1747.090 vol 990 1989.
Holding library: 国立国会図書館
Call No.: M17-89-2550
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003476609
http://id.ndl.go.jp/bib/000003476609
UKMARC No.: G01220128
Bibliographic Record Category (NDL): 215