Multichamber and in-situ processing of electronic materials : Conference : Oct 1989, Santa Clara, CA. (SPIE Proceedings ; 1188)

Multichamber and in-situ processing of electronic materials : Conference : Oct 1989, Santa Clara, CA.

(SPIE Proceedings ; 1188)

Notes on use

Note (General)：: Papers.Index term: SPIE ; MULTICHAMBER PROCESSING ; IN SITU PROCESSING ; ELECTRONIC MATERIALS ; SEMATECH.BL shelfmark: 6823.100 vol 1188 1990.

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Material Type: 図書
ISBN: 0819402249 (pbk)
Title: Multichamber and in-situ processing of electronic materials : Conference : Oct 1989, Santa Clara, CA.
Series Title: SPIE Proceedings ; 1188
Author Heading: SPIE-The International Society for Optical Engineering.
SEMATECH.
Publication, Distribution, etc.: SPIE
Publication Date: 1990.
Publication Date (W3CDTF): 1990
Extent: v.
Alternative Title: SPIE ; MULTICHAMBER PROCESSING ; IN SITU PROCESSING ; ELECTRONIC MATERIALS ; SEMATECH
NDLC: M17
ND
Note (General): Papers.
Index term: SPIE ; MULTICHAMBER PROCESSING ; IN SITU PROCESSING ; ELECTRONIC MATERIALS ; SEMATECH.
BL shelfmark: 6823.100 vol 1188 1990.
Holding library: 国立国会図書館
Call No.: M17-90-1201
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003478653
http://id.ndl.go.jp/bib/000003478653
UKMARC No.: G01345922
Bibliographic Record Category (NDL): 215