Contamination control and defect reduction in semiconductor manufacturing 2 : 2nd Symposium : May 1993, Honolulu, HI. (PV ; 94-3)

Contamination control and defect reduction in semiconductor manufacturing 2 : 2nd Symposium : May 1993, Honolulu, HI.

(PV ; 94-3)

Notes on use

Note (General)：: Papers.Held at the Electrochemical spring meeting.Index term: contamination control ; defect reduction ; semiconductor manufacturing ; electrochemical...

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Material Type: 図書
ISBN: 1566770653 (pbk)
Title: Contamination control and defect reduction in semiconductor manufacturing 2 : 2nd Symposium : May 1993, Honolulu, HI.
Series Title: PV ; 94-3
Author Heading: Electrochemical Society. Electronics Division.
Electrochemical Society. Dielectric Science and Technology Division.
Electrochemical Society of Japan.
Japan Society of Applied Physics (JSAP)
Publication, Distribution, etc.: Pennington, NJ : Electrochemical Society
Publication Date: 1994.
Publication Date (W3CDTF): 1994
Extent: v.
Alternative Title: Held at the Electrochemical spring meeting
contamination control ; defect reduction ; semiconductor manufacturing ; electrochemical
NDLC: M17
ND
Note (General): Papers.
Held at the Electrochemical spring meeting.
Index term: contamination control ; defect reduction ; semiconductor manufacturing ; electrochemical.
BL shelfmark: 6695.400 vol 94-3 1994.
Holding library: 国立国会図書館
Call No.: M17-94-2304
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003495282
http://id.ndl.go.jp/bib/000003495282
UKMARC No.: G02239047
Bibliographic Record Category (NDL): 215