Soft X-ray projection lithography : Topical meeting : May 1993, Monterey, CA. (OSA Proceedings Series ; 18)

Soft X-ray projection lithography : Topical meeting : May 1993, Monterey, CA.

(OSA Proceedings Series ; 18)

Notes on use

Note (General)：: Selected papers and summaries.SXPL is short for soft X-ray projection lithography.Index term: soft x ray projection lithography ; OSA ; SXPL....

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 1557523045
Title: Soft X-ray projection lithography : Topical meeting : May 1993, Monterey, CA.
Series Title: OSA Proceedings Series ; 18
Author Heading: Optical Society of America.
Publication, Distribution, etc.: Optical Society of America
Publication Date: c1993.
Publication Date (W3CDTF): 1993
Extent: v.
Alternative Title: SXPL is short for soft X-ray projection lithography
soft x ray projection lithography ; OSA ; SXPL
NDLC: M17
ND
Note (General): Selected papers and summaries.
SXPL is short for soft X-ray projection lithography.
Index term: soft x ray projection lithography ; OSA ; SXPL.
BL shelfmark: 6296.798465 vol 18 1993.
Holding library: 国立国会図書館
Call No.: M17-95-1675
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003498009
http://id.ndl.go.jp/bib/000003498009
UKMARC No.: G02181144
Bibliographic Record Category (NDL): 215