Jump to main content

図書

Microlithography and metrology in micromachining 2 : 2nd Annual conference : Oct 1996, Austin, TX. (SPIE Proceedings ; 2880)

Icons representing 図書

Microlithography and metrology in micromachining 2 : 2nd Annual conference : Oct 1996, Austin, TX.

(SPIE Proceedings ; 2880)

Call No. (NDL)
M17-96-2195
Bibliographic ID of National Diet Library
000003501436
Material type
図書
Author
SPIE-The International Society for Optical Engineering.ほか
Publisher
-
Publication date
-
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
View All

Notes on use

Note (General)：

Papers.Index term: microlithography ; metrology ; SPIE ; micromachining.

Search by Bookstore

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • CiNii Research

    Search Service
    Paper
    You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
    Check the holdings of this book

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
ISBN
0819422789
Title
Microlithography and metrology in micromachining 2 : 2nd Annual conference : Oct 1996, Austin, TX.
Series Title
SPIE Proceedings ; 2880
Author Heading
SPIE-The International Society for Optical Engineering.
Semiconductor Equipment and Materials International (SEMI)
National Institute of Standards and Technology (NIST)
Extent
v.
Alternative Title
microlithography ; metrology ; SPIE ; micromachining
NDLC
M17
NB
Note (General)
Papers.
Index term: microlithography ; metrology ; SPIE ; micromachining.
Holding library
国立国会図書館