図書

Chemical mechanical planarization 1 : 1st International symposium on chemical mechanical planarization in IC device manufacturing : ------. (PV ; 96-22)

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Chemical mechanical planarization 1 : 1st International symposium on chemical mechanical planarization in IC device manufacturing : ------.

(PV ; 96-22)

Call No. (NDL)
M17-97-1355
Bibliographic ID of National Diet Library
000003503596
Material type
図書
Author
Electrochemical Society. Electronics Division.ほか
Publisher
Electrochemical Society
Publication date
1997.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Selected papers.Published in 1997.Index term: chemical mechanical planarization ; IC device manufacturing ; electrochemical....

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Paper

Material Type
図書
ISBN
1566771722
Title
Chemical mechanical planarization 1 : 1st International symposium on chemical mechanical planarization in IC device manufacturing : ------.
Title Transcription
Chemical mechanical planarization 1 : ------.
Series Title
PV ; 96-22
Author Heading
Electrochemical Society. Electronics Division.
Electrochemical Society. Dielectric Science and Technology Division.
Publication, Distribution, etc.
Pennington, NJ : Electrochemical Society
Publication Date
1997.
Publication Date (W3CDTF)
1997
Extent
v.