Emerging lithographic technologies 3 : Conference : Mar 1999, Santa Clara, CA. (SPIE Proceedings ; 3676)

Emerging lithographic technologies 3 : Conference : Mar 1999, Santa Clara, CA.

(SPIE Proceedings ; 3676)

Notes on use

Note (General)：: Selected papers.In 2 parts.Index term: emerging lithographic technologies ; SPIE ; lithographic technologies....

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Material Type: 図書
ISBN: 0819431508 (pbk)
ISSN: 0277-786X
Title: Emerging lithographic technologies 3 : Conference : Mar 1999, Santa Clara, CA.
Series Title: SPIE Proceedings ; 3676
Author Heading: SPIE-The International Society for Optical Engineering.
Publication, Distribution, etc.: SPIE
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: In 2 parts
emerging lithographic technologies ; SPIE ; lithographic technologies
NDLC: M17
ND
Note (General): Selected papers.
In 2 parts.
Index term: emerging lithographic technologies ; SPIE ; lithographic technologies.
BL shelfmark: 6823.100 vol 3676 1999.
Holding library: 国立国会図書館
Call No.: M17-99-1739
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003509284
http://id.ndl.go.jp/bib/000003509284
UKMARC No.: G05612742
Bibliographic Record Category (NDL): 215