Device and process technologies for MEMS and microelectronics : Conference : Oct 1999, ------. (SPIE Proceedings ; 3892)

Device and process technologies for MEMS and microelectronics : Conference : Oct 1999, ------.

(SPIE Proceedings ; 3892)

Notes on use

Note (General)：: Papers and abstract.Held at the Royal Pines Resort, Queensland, Australia.Index term: microelectronics ; SPIE ; MEMS ; device....

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Material Type: 図書
ISBN: 0819434930
ISSN: 0277-786X
Title: Device and process technologies for MEMS and microelectronics : Conference : Oct 1999, ------.
Series Title: SPIE Proceedings ; 3892
Author Heading: SPIE-The International Society for Optical Engineering.
IREE Society.
Queensland Government State Development.
Publication, Distribution, etc.: SPIE
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: Held at the Royal Pines Resort, Queensland, Australia
microelectronics ; SPIE ; MEMS ; device
NDLC: M17
ND
Note (General): Papers and abstract.
Held at the Royal Pines Resort, Queensland, Australia.
Index term: microelectronics ; SPIE ; MEMS ; device.
BL shelfmark: 6823.100 vol 3892 1999.
Holding library: 国立国会図書館
Call No.: M17-00-0831
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003510648
http://id.ndl.go.jp/bib/000003510648
UKMARC No.: G05936757
Bibliographic Record Category (NDL): 215