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博士論文

Tensile testing of thin films using electrostatic force grip

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Tensile testing of thin films using electrostatic force grip

Call No. (NDL)
UT51-2002-D743
Bibliographic ID of National Diet Library
000003535227
Material type
博士論文
Author
土屋智由 [著]
Publisher
[土屋智由]
Publication date
[2002]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
土屋智由 [著]
Author Heading
土屋, 智由 ツチヤ, トシユキ
Publication, Distribution, etc.
Publication Date
[2002]
Publication Date (W3CDTF)
2002
Extent
1冊
Alternative Title
静電チャックを用いた薄膜引張試験 セイデン チャック オ モチイタ ハクマク ヒッパリ シケン
Degree grantor/type
名古屋大学