Seiken Symposium on micro/nano mechatronics

• Material Type: 図書
• Title: Seiken Symposium on micro/nano mechatronics
• Series Title: Seiken Symposium ; no.30
• Author Heading: 東京大学生産技術研究所 トウキョウ ダイガク セイサン ギジュツ ケンキュウジョ ( 00273922 )Authorities
• Publication, Distribution, etc.: [Tokyo] : [Institute of Industrial Science, the University of Tokyo]
• Publication Date: 2002
• Publication Date (W3CDTF): 2002
• Extent: 153p
• Size: 30cm
• Alternative Title: マイクロ・ナノメカトロニクスの世界 マイクロ ナノ メカトロニクス ノ セカイ
• Place of Publication (Country Code): JP
• Text Language Code: eng
• NDLC: M18; NB21
• Target Audience: 一般
• Note (General): Held at Institute of Industrial Science, the University of Tokyo, Mar.25-26, 2002
• Holding library: 国立国会図書館
• Call No.: M18-B82
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003586392; http://id.ndl.go.jp/bib/000003586392
• National Bibliography No. (JPNO): 20421419
• Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
• Bibliographic Record Category (NDL): 113

Table of Contents

Day-1: March 25th, 2002, Monday

9:40-10:00 Opening Remark/ 5

10:00-12:00 Session-1: Micromachining and Microinspection/ 9

10:00-10:40 "Drilling and Milling of Brittle Materials Using a Micro Cutting Tool"/ 11

10:40-11:20 "Current capabilities of LIGA-based processing as alternative microfabrication technique for high-aspect-ratio MEMS"/ 16