3rd workshop on physical chemistry of wet etching of silicon

Author: Program Committee, workshop on physical chemistry of wet etching of silicon

Publisher: [Program Committee, 3rd workshop on physical chemistry of wet etching of silicon]

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Material Type: 図書
Title: 3rd workshop on physical chemistry of wet etching of silicon
Author Heading: Program Committee, workshop on physical chemistry of wet etching of silicon ( 00916596 )Authorities
Publication, Distribution, etc.: [Nara] : [Program Committee, 3rd workshop on physical chemistry of wet etching of silicon]
Publication Date: [2002]
Publication Date (W3CDTF): 2002
Extent: 83p
Size: 30cm
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: M18
ND371
Target Audience: 一般
Note (General): Held at Nara Prefectural New Auditorium, June 4-6, 2002
Holding library: 国立国会図書館
Call No.: M18-B47
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003587672
http://id.ndl.go.jp/bib/000003587672
National Bibliography No. (JPNO): 20407691
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 113