図書

10th IEEE international conference on advanced thermal processing of semiconductors -- RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada. : Sep 2002, Vancouver, Canada.

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10th IEEE international conference on advanced thermal processing of semiconductors -- RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada. : Sep 2002, Vancouver, Canada.

Call No. (NDL)
M17-03-455
Bibliographic ID of National Diet Library
000004012284
Material type
図書
Author
Gelpey, Jeffrey C.ほか
Publisher
IEEE
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
[ix], 241 p. : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General)：

Program and papers.Related URL: http: //ieeexplore.ieee.org/Xplore/RecentCon.jsp?Punumber=8060.IEEE cat no 02EX574.

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Paper

Material Type
図書
ISBN
0780374657
Title
10th IEEE international conference on advanced thermal processing of semiconductors -- RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada. : Sep 2002, Vancouver, Canada.
Author Heading
Gelpey, Jeffrey C.
International Conference on Advanced Thermal Processing of Semiconductors (10th : 2002 : Vancouver, B.C.)
Publication, Distribution, etc.
Piscataway : IEEE
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
[ix], 241 p. : ill. ; 28 cm.
Alternative Title
RTP 2002
Place of Publication (Country Code)
US