2002 7th international symposium on plasma- and process-induced damage : June 5-7, 2002, Maui, Hawaii, USA. : Jun 2002, ------.

• Material Type: 図書
• ISBN: 0965157776 (softbound); 0965157784 (CD-ROM)
• Title: 2002 7th international symposium on plasma- and process-induced damage : June 5-7, 2002, Maui, Hawaii, USA. : Jun 2002, ------.
• Author Heading: Hook, Terence.; Eriguchi, Koji.; Gabriel, Calvin T.; International Symposium on Plasma Process-Induced Damage (7th : 2002 : Maui, Hawaii)
• Publication, Distribution, etc.: Santa Clara : AVS
• Publication Date: c2002.
• Publication Date (W3CDTF): 2002
• Extent: [6], i, 177 p. : ill. ; 28 cm.
• Alternative Title: P[2]ID
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductor wafers -- Congresses.; Semiconductors -- Effect of radiation on -- Congresses.; Plasma radiation -- Congresses.
• NDLC: M17
• Note (General): Papers and a discussion.; Held at Maui Islands, Hawaii.; Some previous symposia entitled: International Symposium on Plasma Induced-Damage.; IEEE cat no. (softbound) 02TH8582 : IEEE cat no (CD-ROM) 02TH8582C.
• Note (Bibliography): Includes bibliographic references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-03-468
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004012576; http://id.ndl.go.jp/bib/000004012576
• RLIN No.: NYCXV4419797-B
• Bibliographic Record Category (NDL): 215