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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- タンケッショウ Si ヒョウメン ノ ショキ サンカ カテイ オヨビ ショキ タンカ カテイ ノ ケンキュウ
- Author/Editor
- 池田正則 [著]
- Author Heading
- 池田, 正則 イケダ, マサノリ
- Publication, Distribution, etc.
- Publication Date
- [2002]
- Publication Date (W3CDTF)
- 2002
- Extent
- 1冊
- Alternative Title
- Studies of initial oxidation processes and initial carbonization processes on silicon single crystal surfaces