Chemical mechanical planarization 5 : proceedings of the international symposium. : 5th international symposium on chemical mechanical planarization (CMP) : May 2002, Philadelphia, PA. (PV ; 02-1)

Chemical mechanical planarization 5 : proceedings of the international symposium. : 5th international symposium on chemical mechanical planarization (CMP) : May 2002, Philadelphia, PA.

(PV ; 02-1)

Call No. (NDL): M17-03-1022
Bibliographic ID of National Diet Library: 000004097782

Material type: 図書

Author: Seal, S. (Sudipta)ほか

Publisher: Electrochemical Society

Publication date: c2002.

Material Format: Paper

Capacity, size, etc.: vii, 274 p. : ill. ; 24 cm.

NDC: -

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Note (General)：: Papers."Proceedings of the Fifth International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit Device Manufacturing held at...

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Paper

Material Type: 図書
ISBN: 1566773296
Title: Chemical mechanical planarization 5 : proceedings of the international symposium. : 5th international symposium on chemical mechanical planarization (CMP) : May 2002, Philadelphia, PA.
Series Title: PV ; 02-1
Title Heading: Proceedings (Electrochemical Society) ; v. 2002-1.
Author Heading: Seal, S. (Sudipta)
International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing (5th : 2002 : Philadelphia, Pa.)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2002.
Publication Date (W3CDTF): 2002
Extent: vii, 274 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectronics -- Materials -- Congresses.
Grinding and polishing -- Congresses.
Metals -- Pickling -- Congresses.
Integrated circuits -- Materials -- Congresses.
NDLC: M17
Note (General): Papers.
"Proceedings of the Fifth International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit Device Manufacturing held at the 201st Meeting of the Electrochemical Society in Philadelphia, Pennsylvania from May 12th to 17th, 2002" -- Pref.
"Sponsoring Divisions: Dielectric Science and Technology and Electronics" -- T.p.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-1022
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004097782
http://id.ndl.go.jp/bib/000004097782
RLIN No.: CUBGGLAD184956036-B
Bibliographic Record Category (NDL): 215