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図書

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA. (SPIE Proceedings ; 4984)

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Micromachining technology for micro-optics and nano-optics : 28-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA.

(SPIE Proceedings ; 4984)

Call No. (NDL)
M17-03-1602
Bibliographic ID of National Diet Library
000004102029
Material type
図書
Author
Semiconductor Equipment and Materials International (SEMI)ほか
Publisher
SPIE
Publication date
c2003.
Material Format
Paper
Capacity, size, etc.
xlii, 262 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0819447846
ISSN (series)
0277-786X
Title
Micromachining technology for micro-optics and nano-optics : 28-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA.
Series Title
SPIE Proceedings ; 4984
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4984.
Author Heading
Semiconductor Equipment and Materials International (SEMI)
Lee, S. H. (Sing H.) , 1939-
Johnson, Eric G.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2003.
Publication Date (W3CDTF)
2003