Study of particle transport in high pressure sputter deposition process

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Material Type: 博士論文
Title: Study of particle transport in high pressure sputter deposition process
Author/Editor: 中野武雄 [著]
Author Heading: 中野, 武雄ナカノ, タケオ
Publication, Distribution, etc.: [中野武雄]
Publication Date: 2001
Publication Date (W3CDTF): 2001
Extent: 1冊
Alternative Title: 高圧スパッタ製膜プロセスにおける粒子輸送過程の研究コウアツスパッタセイマクプロセスニオケルリュウシユソウカテイノケンキュウ
Degree grantor/type: 東京大学
Date Granted: 平成13年12月14日
Date Granted (W3CDTF): 2001
Dissertation Number: 乙第15210号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2003-D193
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004106142
http://id.ndl.go.jp/bib/000004106142
Bibliographic Record Category (NDL): 213