図書

Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. : 2002 MRS fall meeting in Boston : Dec 2002, Boston, MA. (Materials Research Society Symposia Proceedings ; 745)

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Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. : 2002 MRS fall meeting in Boston : Dec 2002, Boston, MA.

(Materials Research Society Symposia Proceedings ; 745)

Call No. (NDL)
M17-03-1779
Bibliographic ID of National Diet Library
000004153837
Material type
図書
Author
Materials Research Society.ほか
Publisher
Materials Research Society
Publication date
c2003.
Material Format
Paper
Capacity, size, etc.
xiii, 384 p. : ill. ; 24 cm.
NDC
-
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Notes on use

Note (General):

Papers."Papers presented at Symposium N, "Novel Materials and Processes for Advanced CMOS, " held ... at the 2002 MRS Fall Meeting" -- preface.

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Paper

Material Type
図書
ISBN
1558996826
Publication, Distribution, etc.
Publication Date
c2003.
Publication Date (W3CDTF)
2003
Extent
xiii, 384 p. : ill. ; 24 cm.