図書

Technical digest of the 16th International Vacuum Microelectronics Conference : IVMC 2003

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Technical digest of the 16th International Vacuum Microelectronics Conference : IVMC 2003

Call No. (NDL)
M18-B202
Bibliographic ID of National Diet Library
000004180407
Material type
図書
Author
edited by Mikio Takai, Yasuhito Gotoh, Junzo Ishikawaほか
Publisher
[Organizing Committee]
Publication date
2003
Material Format
Paper
Capacity, size, etc.
314p ; 30cm
NDC
-
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Notes on use

Note (General):

Held at Senri Life Science Center, Toyonaka, July 7-11, 2003

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Bibliographic Record

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Paper

Material Type
図書
ISBN
4-8181-9515-4
Author/Editor
edited by Mikio Takai, Yasuhito Gotoh, Junzo Ishikawa
[organized by] 158th Committee Nanoelectronics, Japan Society for the Promotion of Sciencs, National Institute of Advanced Industrial Science and Technology
Author Heading
高井, 幹夫, 1949- タカイ, ミキオ, 1949- ( 00930706 )Authorities
後藤, 康仁, 1962- ゴトウ, ヤスヒト, 1962- ( 00930707 )Authorities
石川, 順三, 1946- イシカワ, ジュンゾウ, 1946- ( 00843756 )Authorities
日本学術振興会 ニホン ガクジュツ シンコウカイ ( 00257279 )Authorities
産業技術総合研究所 サンギョウ ギジュツ ソウゴウ ケンキュウジョ ( 00873736 )Authorities
Publication, Distribution, etc.
Publication Date
2003
Publication Date (W3CDTF)
2003
Extent
314p
Size
30cm