Materials science of microelectromechanical systems (MEMS) devices 3 : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. : Symposium EE, "Materials Science of Microelectromechanical Systems (MEMS) Devices 3" : Nov 2000, Boston, MA. (Materials Research Society Symposia Proceedings ; 657)

Materials science of microelectromechanical systems (MEMS) devices 3 : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. : Symposium EE, "Materials Science of Microelectromechanical Systems (MEMS) Devices 3" : Nov 2000, Boston, MA.

(Materials Research Society Symposia Proceedings ; 657)

Call No. (NDL): M17-03-2073
Bibliographic ID of National Diet Library: 000004182763

Material type: 図書

Author: Kahn, Harold.

Publisher: Materials Research Society

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill ; 24 cm.

NDC: -

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Notes on use

Note (General)：: Papers.Held at the 2000 MRS fall meeting in Boston, Massachusetts.

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Paper

Material Type: 図書
ISBN: 1558995676
Title: Materials science of microelectromechanical systems (MEMS) devices 3 : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. : Symposium EE, "Materials Science of Microelectromechanical Systems (MEMS) Devices 3" : Nov 2000, Boston, MA.
Series Title: Materials Research Society Symposia Proceedings ; 657
Title Heading: Materials Research Society symposia proceedings ; v. 657.
Author Heading: Kahn, Harold.
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: 1 v. (various pagings) : ill ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems -- Materials -- Congresses.
LCC: TK7875
DDC: 621.381
NDLC: M17
Note (General): Papers.
Held at the 2000 MRS fall meeting in Boston, Massachusetts.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-2073
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004182763
http://id.ndl.go.jp/bib/000004182763
LC Control Number: 2001044289
https://lccn.loc.gov/2001044289
RLIN No.: NJRGA1659179-B
Bibliographic Record Category (NDL): 215