Smart sensors, actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain. : May 2003, Maspalomas, Spain.

• Material Type: 図書
• ISBN: 0819449768
• ISSN (series): 0277-786X
• Title: Smart sensors, actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain. : May 2003, Maspalomas, Spain.
• Series Title: SPIE Proceedings ; 5116
• Title Heading: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5116.
• Author Heading: Las Palmas University Foundation.; Chiao, Jung-Chih.; Varadan, V. K., 1943-; Cané, Carles.; Sociedad Española de Optica (SEDO)
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2003.
• Publication Date (W3CDTF): 2003
• Extent: 2 v. : ill. (some col.) ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Microelectromechanical systems -- Congresses.; Microtechnology -- Congresses.; Actuators -- Industrial applications -- Congresses.; Detectors -- Industrial applications -- Congresses.; Scanning systems -- Congresses.
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-04-121
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004190256; http://id.ndl.go.jp/bib/000004190256
• RLIN No.: GAEGO52604958-B
• Bibliographic Record Category (NDL): 215