2003 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings : 31 March-1 April, 2003 : Munich, Germany. : Mar 2003, Munich, Germany.

• Material Type: 図書
• ISBN: 0780376730
• ISSN: 1078-8743
• Title: 2003 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings : 31 March-1 April, 2003 : Munich, Germany. : Mar 2003, Munich, Germany.
• Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (14th : 2003 : Munich, Germany)
• Publication, Distribution, etc.: Piscataway : IEEE; San Jose : SEMI
• Publication Date: c2003.
• Publication Date (W3CDTF): 2003
• Extent: iv, 330 p. : ill. ; 30 cm.
• Alternative Title: ASMC 2003 : the 14th annual IEEE/SEMI advanced semiconductor manufacturing conference and workshop (ASMC) 2003 : advancing the science and technology of semiconductor manufacturing : 31 March-1 April : International Congress Centre : Munich, Germany
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductor industry. -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Process control. -- Congresses.
• NDLC: M17
• Note (General): Papers.; "Advanced Semiconductor Manufacturing Conference and Workshop : World Class Manufacturing" -- on t. p.; IEEE cat no 03CH37406.
• Note (Bibliography): Includes bibliographical references.
• Note (Additional Physical Form Available): Also available via the World Wide Web.
• Holding library: 国立国会図書館
• Call No.: M17-04-212
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004190370; http://id.ndl.go.jp/bib/000004190370
• RLIN No.: MOHG52193027-B
• Bibliographic Record Category (NDL): 215