Device and process technologies for MEMS and microelectronics 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's symposium on microtechnology and MEMS : Dec 2001, Adelaide, Australia. (SPIE Proceedings ; 4592)

Device and process technologies for MEMS and microelectronics 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's symposium on microtechnology and MEMS : Dec 2001, Adelaide, Australia.

(SPIE Proceedings ; 4592)

Call No. (NDL): M17-03-3033
Bibliographic ID of National Diet Library: 000004200597

Material type: 図書

Author: Institute of Electrical and Electronics Engineers. South Australia Section.ほか

Publisher: SPIE

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: xi, 538 p. : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Accompanying material：: Errata sheet has tipped in.

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Paper

Material Type: 図書
ISBN: 0819443220
ISSN (series): 0277-786X
Title: Device and process technologies for MEMS and microelectronics 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's symposium on microtechnology and MEMS : Dec 2001, Adelaide, Australia.
Series Title: SPIE Proceedings ; 4592
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4592.
Author Heading: Institute of Electrical and Electronics Engineers. South Australia Section.
Chiao, Jung-Chih.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: xi, 538 p. : ill. ; 28 cm.
Accompanying material: Errata sheet has tipped in.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems -- Congresses.
Photon detectors -- Design and construction -- Congresses.
Photomechanical processes -- Congresses.
Photolithography -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-03-3033
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004200597
http://id.ndl.go.jp/bib/000004200597
RLIN No.: CSUGA4756148-B
Bibliographic Record Category (NDL): 215